Hi Nicolas,
I use 353ND by Epoxy Technology, USA for mounting of wafers, and the
stack pass all operations (litho, chemical etches, evaporation and
sputtering properly). We not use DRIE, but I think it will be OK.
Sincerely,
Vladimir Krasniansky,
Process Engineer,
Gal-El (MMIC);
100, Yitzhak Hanassi Blvd., P.O. Box 330 Ashdod 77102, ISRAEL.
Tel 972-8-857-2436/4
Fax 972-8-857-2658
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