Hi,


During the KOH etch on {100} silicon surfaces, lots of micropyramid hillocks are
formatted. I was wondering if there is any effective method that can be used to
get a smooth and pyramid free etched surface. I used 30% w/w KOH and IPA and did
the etch at 80C. Please let me know if you have any comments or suggestions.
Thanks!



Best Regards,


Qing Yao
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M&IE @ UIUC