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MEMSnet Home: MEMS-Talk: Regd KOH Bath Temperature Tolerance
Regd KOH Bath Temperature Tolerance
2004-10-05
guda reddy
2004-10-06
Keith Jackson
Regd KOH Bath Temperature Tolerance
guda reddy
2004-10-05
Hi,

 I would like to know what could be the allowed temperature tolerance for the
KOB bath used for etching silicon, as we cannot maintain the bath exactly at one
particular temperature as it keeps fuctuating around 2-3 degrees.
I would really appreciate if you could reply.

Thanks,
dhanamjaya
reply
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