A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: problems with gold plating
problems with gold plating
2004-10-06
Robert Dean
2004-10-10
IGOR KADIJA
2004-10-12
Josef Kouba
2004-10-07
Gary
problems with gold plating
Robert Dean
2004-10-06
Hello,

For a MEMS die bonding application, we need to plate 2um of Au onto a flat
silicon die cap that has TiAu (800A /1500A) E-beam deposited onto the SiO2
surface layer.  We are attempting to electroplate gold onto the entire
surface, i.e. no photoresist mold.  When we have the current set low, we
only get gold plated in a few islands.  When we increase the current until
we start getting uniform plating on the entire surface, we soon get one or
more black spots that grow in size and limit the plating.  Any suggestions?

Sincerely,

Robert Dean
Auburn University


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
MEMStaff Inc.
Mentor Graphics Corporation
University Wafer
MEMS Technology Review