I have been using 85 C as a bath temp. with 0.1 degree control
Keith Jackson
----- Original Message -----
From: "guda reddy" 
To: "General MEMS discussion" 
Sent: Tuesday, October 05, 2004 2:32 PM
Subject: [mems-talk] Regd KOH Bath Temperature Tolerance


> Hi,
>
>  I would like to know what could be the allowed temperature tolerance for
the KOB bath used for etching silicon, as we cannot maintain the bath
exactly at one particular temperature as it keeps fuctuating around 2-3
degrees.
> I would really appreciate if you could reply.
>
> Thanks,
> dhanamjaya
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