I recommend direct vapor draw
from a Schumacher type vessel
using an alternate liquid source.
Tetramethylgermane [865-52-1]
has a reasonable vapor pressure (~375mm, 27C)
A wide range of oxy or chlorogermanes are
available but most have lower vapor pressure.

Bill Flounders
Technology Manager
Microfabrication Laboratory
University of California, Berkeley

Office:   (510) 643-6779
Fax:      (510) 642-2916
Email:    [email protected]




David Kelly wrote:
> Now here is a tough one.. let's see if anyone can get me an answer on this.
>
> I need methylgermane gas for an experiment I am trying (for carbon-doped
> germanium).  The chemical formula is CH3GeH3, and the CAS number is
> 1449-65-6.  NONE of the gas companies that I know about offer this gas..
> I have already tried that.
>
> But maybe there's a university research lab or another group that might
> be willing to sell me this (or maybe there's an obscure company out
> there that would make it).  I need semiconductor-grade purity, too.
>
> If anyone could help, they would be my personal hero.  THANKS!
>
> David Kelly
> Univ. of Texas
>
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