check the e-beam SWEEP coils (X- and Y-), see if they are open or shorted to
the ground.
Honggang

-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of Archy Xuan
Sent: Wednesday, October 06, 2004 9:41 AM
To: [email protected]
Subject: [mems-talk] eBeam evaporator problem


Hi, all,   In my lab there is this 20 yr old NRC e-beam evaporator that
broke down lately. We had some urgent project needs be done and this busted
me.

The symptom is that the beam won't focus, and is very broad (~3/4"
diameter).  In effect, it heats up the edge of the crucible.  We can't melt
anything in the crucible, not even Au.
I have no clue how to fix this thing.  I'm guessing that the focusing
mechanism is busted.

anybody can throw some ideas? It's fairly urgent and thanks!


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