Any accurate but cheap way to get an etch stop
usingTMAH
Shile
2004-10-07
>From an earlier posting:
Try this paper:
Steinsland et.al., Sensors and Actuators A 54, 728-732, 1996.
Good luck,
Knut
Knut Lian
Process Development Engineer
Wafer Fab Technology Development
SensoNor as
PO Box 196, N-3192 Horten
Norway
Tel: +47 33 03 50 68
Fax: +47 33 03 51 05
