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MEMSnet Home: MEMS-Talk: eBeam evaporator problem
eBeam evaporator problem
2004-10-06
Archy Xuan
2004-10-06
Mike Colgan
2004-10-06
Honggang Jiang
2004-10-07
William Lanford-Crick
2004-10-08
rakesh babu
eBeam evaporator problem
rakesh babu
2004-10-08
xuan,

  Do you have a programmable sweep on the machine. If
so this sweep can be connected externally to a tool
that has 3 controls.

  You can manually adjust the position of the beam
using this control. I can give you more specific
details about this if you have the above.

Sincerely
Rakesh Katragadda
Graduate Researcher
Wayne State Univ


--- Archy Xuan  wrote:

> Hi, all,   In my lab there is this 20 yr old NRC
> e-beam evaporator that broke down lately. We had
> some urgent project needs be done and this busted
> me.
>
> The symptom is that the beam won't focus, and is
> very broad (~3/4" diameter).  In effect, it heats up
> the edge of the crucible.  We can't melt anything in
> the crucible, not even Au.
> I have no clue how to fix this thing.  I'm guessing
> that the focusing mechanism is busted.
>
> anybody can throw some ideas? It's fairly urgent and
> thanks!
>
>
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