We have several systems like this in our lab, as far as the turbo
changing; you will want to purchase a corrosive series maglev.
Magnetically Levitated turbo's offer better MTBF than those with fixed
bearings. Sieko-Sieki or Shimadzu are the best in my opinion. The up
front cost is higher, but you will save the cost of one if not multiple
rebuild/replacements of a standard turbo.
Joe Lonjin
Penn State Nanofabrication Facility
College of Engineering
173 MRI Building
230 Innovation Blvd
University Park, PA 16802
[email protected]
(814) 865-9284
-----Original Message-----
From: William Lanford-Crick [mailto:[email protected]]
Sent: Thursday, October 07, 2004 1:41 PM
To: General MEMS discussion
Subject: RE: [mems-talk] Plasma-Therm ICP
Hi Charlie,
We have a single chamber Plasma Therm system, which is heavily used for
III-Vs and SiC. Most etching is with Cl2 or other chlorine-based gases
and
SF6. We unfortunately have to have the turbo pump rebuilt every 6
months or
so (we are not sure why it fails so frequently).
We don't ever have problems with "wafers lost inside" (how are the
wafers
getting lost? Is there some problem with the handler?) but we open the
chamber nearly every week for cleaning. The SF6 and SiCl4 which is used
deposits lots of residue on the chamber walls and on the top electrode
which
must be cleaned frequently. We scrub the chamber and then pump down for
8
hours before using it again.
Hope this help,
Bill
-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of Charlie Suh
Sent: Thursday, October 07, 2004 11:59 AM
To: [email protected]
Subject: [mems-talk] Plasma-Therm ICP
I was wondering if anyone else on this newsgroup uses a dual
chamber Plasma-Therm ICP. I have a few questions for those who do.
1. How often do you have to change out your turbo pumps to be serviced?
2. What kind of restrictions do you have for each chamber?
3. How often do you have to open the chamber to remove wafers lost
inside.
Thank you,
Charlie
--
Charlie Suh
Electrical Engineer II
Mircoelectronics Research Center
791 Atlantic Drive
Atlanta, Georgia 30332
Email: [email protected]
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