Hi,
I need an etchant that can etch Si3N4 but not SiO2.
Anybody can suggest anything?

And also:
Do you know any etchant which can etch both SI3N4 and SiO2?

I need both processes,

Thanks all,
Laleh



Quoting Siripon Sukuabol :

> Dear All;
>
> Anyone can suggest me where/which company sells this
> product and how I can get its datasheet.
>
> Thanks All;
>
> Regards;
>
> Siripon
>
>
>
>
>
>
>
>
>
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Laleh Rabieirad
PhD Student
ECE Department
Purdue University