Hi Charlie,
We ship the pump out and have it rebuilt.  I'm unsure as to what precisely
they replace.
The pump eventually will shut itself off (or the ICP-RIE shuts it off) and
needs to be restarted.  Once this happens more frequently (i.e. either does
not restart or shuts off immediately after restart) we swap to another pump
and send the 1st out to be rebuilt.  It is several $1000s per rebuild.
-Bill

-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of Mark Fuller
Sent: Friday, October 08, 2004 9:46 AM
To: General MEMS discussion
Subject: RE: [mems-talk] Plasma-Therm ICP


At 12:41 PM 10/7/2004 -0500, you wrote:
>Hi Charlie,
>We have a single chamber Plasma Therm system, which is heavily used for
>III-Vs and SiC.  Most etching is with Cl2 or other chlorine-based gases and
>SF6.  We unfortunately have to have the turbo pump rebuilt every 6 months
or
>so (we are not sure why it fails so frequently).
>
What part of the pump gets replaced on the rebuild?
What indicates when you have to do a rebuild?


--
Mark Fuller
Microelectronics Fabrication Facility
Washington State University
Dana Hall 102
Pullman, WA  99164-2711
(509)335-1797
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