A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Plasma-Therm ICP
Plasma-Therm ICP
2004-10-07
Charlie Suh
2004-10-07
William Lanford-Crick
2004-10-08
Mark Fuller
2004-10-09
William Lanford-Crick
ANSYS Piezoresistive analysis
2004-10-10
rakesh babu
2004-10-11
Brent Garber (2 parts)
Feedthrough needed for a CVC evaporator
2004-10-07
Rajib Ahmed
2004-10-08
Joe Lonjin
Plasma-Therm ICP
Brent Garber
2004-10-11
Dear Mark (and pass this on to Charlie)

My RIE has a corrosive series turbo pump with a N2 purge port that puts 10 sccm
of N2 over the bearings to protect the lubrication from being removed.  Any
turbo
that needs to get sent out that did not blow up is just getting a new bearing
assembly installed.  If you are sending your pump out too often you need to make
sure your turbo is made for corrosives and has a N2 purge on the pump.  Also
make
sure the correct oil is used in the pump.

Have a good day,

Brent

Mark Fuller wrote:

> At 12:41 PM 10/7/2004 -0500, you wrote:
> >Hi Charlie,
> >We have a single chamber Plasma Therm system, which is heavily used for
> >III-Vs and SiC.  Most etching is with Cl2 or other chlorine-based gases and
> >SF6.  We unfortunately have to have the turbo pump rebuilt every 6 months or
> >so (we are not sure why it fails so frequently).
> >
> What part of the pump gets replaced on the rebuild?
> What indicates when you have to do a rebuild?
>
> --
> Mark Fuller
> Microelectronics Fabrication Facility
> Washington State University
> Dana Hall 102
> Pullman, WA  99164-2711
> (509)335-1797
> _______________________________________________
> [email protected] mailing list: to unsubscribe or change your list
> options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
> Hosted by the MEMS Exchange, providers of MEMS processing services.
> Visit us at http://www.memsnet.org/
garber.vcf (text/x-vcard, 344 bytes)
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Mentor Graphics Corporation
The Branford Group
Harrick Plasma, Inc.
MEMStaff Inc.