Place your glass (square, rectangular slides) on a circular plate or wafer, and
then spin coat the PR.

Krishna Vummidi  wrote:Hi,
Im trying to pattern su-8 on glass (square, rectangular slides). Edge bead seems
to be inevitable. Suggestions on minimizing them would be really appreciated.
thanks, krishna

````````````````````````````````````````````````````````````````````````````````
`````````````````````````````````````````````````
Krishna Vummidi

GRA, Wireless Microsystems Lab (www.ece.vt.edu/wml)
The Bradley Department of Electrical and Computer Engineering
Virginia Polytechnic Institute and State University
433 Whittemore Hall (Mail Code 0111), Blacksburg, VA 24061

(540) 231-3411 (Voice) -3362 (Fax) E-mail: [email protected]

````````````````````````````````````````````````````````````````````````````````
`````````````````````````````````````````````````
_______________________________________________
[email protected] mailing list: to unsubscribe or change your list
options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
Hosted by the MEMS Exchange, providers of MEMS processing services.
Visit us at http://www.memsnet.org/



(Pramod Gupta)
21084 Red Fir Court
Cupertino, CA 95014
Phone: (408) 253-1646