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Hi,
I was wondering if someone could point me towards an etchant that would
selectively etch SiO2, but not Nitride. I tried using BOE, but the
selectivity was pretty low.
Thanks,
Kishore
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Kishore Sundara-Rajan Dept. of Electrical Engineering
Graduate Research Assistant University of Washington
[email protected] Campus Stop 352500
Mobile : (206) 351-8101 Seattle WA 98105
Fax : (206) 632-3080 Office : (206) 221-6673
http://students.washington.edu/kishore www.kishore-sr.com
PGP Finger Print: BE5A 90BE 904F 766B 979A 910E E831 C2C3 0347 235F
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