Hi,
Would you please tell me the etch rate of Si-Nitride in BHF?

Thanks
Laleh Rabieirad
PhD Student
ECE Department
Purdue University

Quoting Peter Andreas Rasmussen :

> Then your nitride is of poor quality - perhaps PECVD? I've measured the
> ethcrate of Si-rich LPCVD sini in 5% BHF to 0.4 nm/min. (giving etch-rate
> ratio between oxide and nitride of ~200!)
>
> regards,
> Peter Andreas Rasmussen
> Postdoctoral Research Fellow
> MIC - Institute for Nano and Microtechnology
> Technical University of Denmark
>
> Phone: (+45) 4525 5732 Mail: [email protected]
> http://www.mic.dtu.dk/
>
>
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