How about Nickle Chromium (NiCr)?  It can be sputtered, and is resistive.  I
don't know if it's compatible with your process or needs, but the material
properties can be found online at a variety of places.

David Nemeth
Senior Engineer
Sophia Wireless, Inc.
14225-C Sullyfield Circle
Chantilly, VA
Ph: (703) 961-9573 x206
Fax:(703) 961-9576

-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of Sebastian Sosin
Sent: Friday, October 15, 2004 4:02 AM
To: [email protected]
Subject: SPAM-LOW: [mems-talk] metallic microhotplate


I have to make a heater but there is a problem: it must be made of some
metal, not of polysilicon, and the metal shouldn't be Platinum. The max
temperature is 450-500 Celsius.
What metal can I use?

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