Hi, dear all,



Now I have a SOI wafer in hand.  I need to get the device layer only.  What
should I do to remove the handle layer and BOX?



One way to do is to use KOH to remove the handle layer first, then use HF to
remove the BOX?  Is there any other process to do this?



Thank you very much.



Sincerely,



Ying Cai