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MEMSnet Home: MEMS-Talk: alternative metal adhesion layers
alternative metal adhesion layers
2004-10-18
Tripp, Marie Kathleen
alternative metal adhesion layers
Tripp, Marie Kathleen
2004-10-18
Hi,

Can anyone recommend a seed layer for adhesion of gold onto silicon other than
chromium, titanium, or titanium/tungsten?  I am looking for something with a
higher conductivity than chromium but that has a higher chemical resistance to
HF than titanium.  I was wondering if there are any other less commonly used
metals that might work for me.  Your suggestions are greatly appreciated.

Thanks,
Marie

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