What do you mean by "BOX", the buried silicon oxide layer?


On Sat, 16 Oct 2004 11:51:11 -0500, Ying Cai  wrote:
> Hi, dear all,
>
> Now I have a SOI wafer in hand.  I need to get the device layer only.  What
> should I do to remove the handle layer and BOX?
>
> One way to do is to use KOH to remove the handle layer first, then use HF to
> remove the BOX?  Is there any other process to do this?
>
> Thank you very much.
>
> Sincerely,
>
> Ying Cai
>
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