hi,

   I need to spin-coat a layer of very thin (~50nm) AZ9260 photoresist.
Normally AZ9260 is for thickness range 4um to 25um. By adding AZEBR thinner
to a certain ratio (from 1:5 to 1:50), it can be diluted and spin-coated to
sub-micron thickness. However, the film formed by the diluted solution will
always contain some big black polymer beads which seriously harm the
quality of the film. Does anyone have similar experience and can tell a
little bit information on how to avoid this problem? Thanks a lot.

   Jiang