Nichrome sputtering works well but has lot of
stress at thicker depositions.  Consequently, we
have experienced adhesion problems at 0.5um and greater.

Cheers,

Amish Desai
Tanner Research MEMS Fab



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Message: 5
Date: Fri, 15 Oct 2004 09:58:59 -0700
From: "Kirt Williams" 
Subject: Re: [mems-talk] metallic microhotplate
To: "General MEMS discussion" 
Message-ID: <037d01c4b2d8$44d3ae60$6701a8c0@HPm495c2004>
Content-Type: text/plain;       charset="iso-8859-1"

Nichrome (80Ni 20Cr) will also work as a heater.
It has the benefit of good adhesion--no adhesion layer needs to be added.
A rough idea is of sheet resistance is 50 ohms/square at 650 A thickness.

I've also seen a paper in which pure chromium was used.

Tantalum, tantalum nitride, and TaAl alloy (used in some thermal inkjet
heads) are other options.

    --Kirt Williams