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MEMSnet Home: MEMS-Talk: TiN vendor
TiN vendor
2004-10-15
Thomas Rocco Tsao
2004-10-16
narges afshari
2004-10-18
Thomas Rocco Tsao
TiN vendor
Thomas Rocco Tsao
2004-10-18
> hello Mr Rocco
> I'm a student in metallurgy. could you please explain
> to me what application has Cr/TiN/Au on Si? I coated
> Cr/TiN on steel for corrosion resistance..
> thanks
> Afshar

Hi Afshar -

The only thing special about my request is the use of TiN as a diffusion
barrier to prevent the Au from mixing with the Si, especially at slightly
elevated temperatures.  This causes deterioration of both mechanical and
electrical properties.

-Tom

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