how to spincoat a 50nm thin uniform film of AZ9260?
Z. Jiang
2004-10-19
hi chan,
The reason is that with any kind of AZ series photoresist, if you don't
dilute, you will never be able to get around 50nm thin film. In this view,
AZ9260 and AZ3312 doesn't differ too much I think.
cheers
jiang