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MEMSnet Home: MEMS-Talk: how to spincoat a 50nm thin uniform film of AZ9260?
how to spincoat a 50nm thin uniform film of AZ9260?
2004-10-18
Z. Jiang
2004-10-18
Isaac Wing Tak Chan
2004-10-18
Isaac Wing Tak Chan
2004-10-18
Borski, Justin
2004-10-19
Z. Jiang
2004-10-20
narges afshari
2004-10-19
Z. Jiang
2004-10-19
Isaac Wing Tak Chan
how to spincoat a 50nm thin uniform film of AZ9260?
Z. Jiang
2004-10-19


hi chan,

  The reason is that with any kind of AZ series photoresist, if you don't
dilute, you will never be able to get around 50nm thin film. In this view,
AZ9260 and AZ3312 doesn't differ too much I think.

 cheers

 jiang



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