how to spincoat a 50nm thin uniform film of AZ9260?
Isaac Wing Tak Chan
2004-10-19
Call Clariant to see if you can get PGMEA solvent or if they can do
something for you.
Isaac
On Tue, 19 Oct 2004, Z. Jiang wrote:
>
>
> hi,
>
> Thank you very much ineed for you information. But I didn't find any
> resist-dilution solvent other than the AZEBR.
>
> cheers
>
> jiang
>
>
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Yours sincerely,
Isaac Chan
Ph.D. Candidate
Dept. Electrical & Computer Engineering
University of Waterloo
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Waterloo, Ontario, Canada
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