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MEMSnet Home: MEMS-Talk: how to spincoat a 50nm thin uniform film of AZ9260?
how to spincoat a 50nm thin uniform film of AZ9260?
2004-10-18
Z. Jiang
2004-10-18
Isaac Wing Tak Chan
2004-10-18
Isaac Wing Tak Chan
2004-10-18
Borski, Justin
2004-10-19
Z. Jiang
2004-10-20
narges afshari
2004-10-19
Z. Jiang
2004-10-19
Isaac Wing Tak Chan
how to spincoat a 50nm thin uniform film of AZ9260?
Isaac Wing Tak Chan
2004-10-19
Call Clariant to see if you can get PGMEA solvent or if they can do
something for you.

Isaac

On Tue, 19 Oct 2004, Z. Jiang wrote:

>
>
> hi,
>
>   Thank you very much ineed for you information. But I didn't find any
> resist-dilution solvent other than the AZEBR.
>
>   cheers
>
>   jiang
>
>
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Yours sincerely,

Isaac Chan

Ph.D. Candidate
Dept. Electrical & Computer Engineering
University of Waterloo
200 University Ave. W
Waterloo, Ontario, Canada
N2L 3G1
Tel: (519) 888-4567, ext. 6014
Fax: (519) 746-6321
[email protected]
http://www.ece.uwaterloo.ca/~a-sidic

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