Dear Colleagues,
Does anyone have any experience of scribing Lithium Niobate SAW wafers (128
Y-X). The wafers are 0.5 mm thick. We would be grateful for any tips!
Thanks,
Andrew Turton
School of Engineering
University of Durham
South Road
Durham
DH1 3LE
ENGLAND
e-mail - [email protected]
Dept. 0191 334 2525
Fax. 0191 334 2407
http://www.dur.ac.uk/microsystems.technology/