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MEMSnet Home: MEMS-Talk: Scribing Lithium Niobate
Scribing Lithium Niobate
2004-10-19
Andrew Turton
Scribing Lithium Niobate
Andrew Turton
2004-10-19
Dear Colleagues,

Does anyone have any experience of scribing Lithium Niobate SAW wafers (128
Y-X). The wafers are 0.5 mm thick.  We would be grateful for any tips!

Thanks,

Andrew Turton

School of Engineering
University of Durham
South Road
Durham
DH1 3LE
ENGLAND

e-mail - [email protected]
Dept. 0191 334 2525
Fax.   0191 334 2407
http://www.dur.ac.uk/microsystems.technology/
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