As a follow-up to my earlier post on TiN diffusion barriers, I have been
told by one person that TiW is more often used.

Can anybody comment on their experience w/ TiW as a diffusion barrier,
esp how it compares with TiN?

Searching the archives, I can see that basic H2O2 (potentially combined
with EDTA) can be used to etch TiW, but that sometimes, it doesn't work
(i.e. may be some subleties involved).  Does anybody have any personal
experience with etching TiW?

Thanks in advance.

-Tom