Dear all,

  I have fabricated different "square" patterns on top of quartz substrates.
Some of the square are made of Au and the others are made of SiO2 and their
thicknesses are around 0.5 to 1um. Since the Au and SiO2 square patterns
cannot be fabricated at the same time. Thereofore, the height of them are
not the same. So, I am thinking if I can polish them at the same time so
that the heights of those Au and SiO2 squares are the same. Would you
minding telling me if there is such kind of polishing machines which can
achieve my goal?  And the main point is the resolution in vertical axis
should be small enough (like several hundred A) so that my patterns will not
go away. If so, would you mind telling me where I can get a quota on this
machine?

Thank you very much for your help first.

Best regards,
Hoyin