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MEMSnet Home: MEMS-Talk: how to spincoat a 50nm thin uniform film of AZ9260?
how to spincoat a 50nm thin uniform film of AZ9260?
2004-10-18
Z. Jiang
2004-10-18
Isaac Wing Tak Chan
2004-10-18
Isaac Wing Tak Chan
2004-10-18
Borski, Justin
2004-10-19
Z. Jiang
2004-10-20
narges afshari
2004-10-19
Z. Jiang
2004-10-19
Isaac Wing Tak Chan
how to spincoat a 50nm thin uniform film of AZ9260?
narges afshari
2004-10-20
Hi Jiang
I'm a student in metallorgy...and I like to know about
spincoating ...but I don't know means of AZ9260
-AZ3312,... could you please guide me?
Thanks

--- "Z. Jiang"  wrote:

>
>
>
> hi chan,
>
>   The reason is that with any kind of AZ series
> photoresist, if you don't
> dilute, you will never be able to get around 50nm
> thin film. In this view,
> AZ9260 and AZ3312 doesn't differ too much I think.
>
>  cheers
>
>  jiang
>
>
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