Dear colleques,

does anybody know of a supplier of ITO coated glass (low quantity)?
The ITO should be 100 nm thickness, the dimensions of the glass should be 5
x 5 cm2 (or 3" wafer size), with polished edges.
Currently we have problems with particles on the substrates. The particles
(glass)originate from the edge of the substrates which is not polished.
Washing in ultra sonic bath does not help much.


Please reply to me and not to the entire mems-talk list.

Best regards

Burkhard Volland