I do not have stress-strain curves of SU-8, but I can measure
stress-strain curves of SU-8 coated on 4" (100mmm) Si wafer, please see
bellow similar measurements within my paper published at MRS Fall 2003,
section U11.29:
http://www.mrs.org/members/proceedings/fall2003/u/U11_29.pdf
Mircea
[email protected] wrote:
>
> We are doing thermal, mechanical simulation of SU-8 structure. I find the
> data sheet for SU-8 with modulus, CTE, Tg, etc. But I need the
> visco-elastic/plastic properties or the stress-strain curves at different
> temperatures (or atleast at room temp - 25C and molding temp - 175C) to
> complete the analysis. If you have these data or you know where I can find
> these data, please let me know, thanks!
> Gene
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--
------------------------------
Mircea Capanu, Ph.D.
MicroSystemTechnology Engineer
R&D Gennum Corporation
P.O. Box 489, Station A,
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or
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Burlington, ON, Canada L7L 5P5
Phone: (905)-632-2999 ext. 2147
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