> Nichrome sputtering works well but has lot of
> stress at thicker depositions.  Consequently, we
> have experienced adhesion problems at 0.5um and greater.

We've been able to deposit 1um NiCr films at <200MPa stress,
still trending towards zero, using RF bias.

best regards,
klaus


--
Klaus Beschorner
Metron Technology Europe, PVD (Eclipse) Process Manager
Drosselweg 6,71120 Grafenau,Germany. Tel +49-7033-45683