Dear Hoyin:

South Bay Technology offers a wide range of polishing machnies and
polishing fixtures that would be appropriate for this application.  I
know that one of our series of fixtures was actually developed for mems
processing.  We offer polishing fixtures with various mounting methods -
wax mounting or vacuum mounting - as well as digital gauges for
measuring sample thickness.

If you have an interest, please contact me off-line and I will send you
details.

DISCLAIMER: South Bay Technology produces equipment and supplies as
described above and, therefore, has a vested interest in promoting their
use.

Best regards-

David

--
David Henriks

South Bay Technology, Inc.
1120 Via Callejon
San Clemente, CA 92673 USA

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Ho Yin Chan wrote:

>
> Dear all,
>  I have fabricated different "square" patterns on top of quartz
> substrates. Some of the square are made of Au and the others are made
> of SiO2 and their thicknesses are around 0.5 to 1um. Since the Au and
> SiO2 square patterns cannot be fabricated at the same time.
> Thereofore, the height of them are not the same. So, I am thinking if
> I can polish them at the same time so that the heights of those Au and
> SiO2 squares are the same. Would you minding telling me if there is
> such kind of polishing machines which can achieve my goal?  And the
> main point is the resolution in vertical axis should be small enough
> (like several hundred A) so that my patterns will not go away. If so,
> would you mind telling me where I can get a quota on this machine?
> Thank you very much for your help first.
> Best regards,
> Hoyin
>
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