Total answer:- 1) Use vacuum vapor prime for HMDS treatment any other treatment
will leave moisture on the surface and cause resist lifting.  Send me samples
for free treatment to prove adhesion.  The samples will be hydrophobic after
treatment and will survive weeks of exposure to normal atmosphere with no loss
of adhesion.
               2) consider image reversal for lift off profile using this you
can get less than 0.1 micron lines and spaces less than 0.1 micron metal lines
and can operate in resist up to 40 microns thick.  Again free tests.  Added
bonus, if you like both processes we manufacture a dual function unit that does
vacuum prime and image reversal.  Bill Moffat, contact me at
[email protected]