Hi there,

my Ph.D. thesis
URN: urn:nbn:de:hebis:34-1167
URL: http://opus.uni-kassel.de/opus/volltexte/2004/116/
(download of full text is free of charge)

gives some phenomenological equations for etching and deposition. In
addition, there's a summary on silicon etching by fluorine and polymer
deposition, with a number of literature references for further studies.
This is probably not excactly what you want, but hopefully close to.

Best regards

B. Volland
-----Ursprüngliche Nachricht-----
Von: Stephan Biber 
An: [email protected] 
Datum: Wednesday, October 20, 2004 6:41 PM
Betreff: [mems-talk] Bosch-process: chemical reaction??


>Hey there,
>
>I am using the Bosch process for some time now, and it works very nice.
>The only question left is: Does anyone have a publication that shows the
>etching and the passivation process summarized in a few (or only one?9
>chemical reactions including all the molecules involved?
>
>Best regards,
>
>Stephan
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