Hi All,
I'm tryig to make structures of su8 formed directly on a chrome mask.
I want to remove cross linked su8 pattern to reuse the mask.
Dose anyone has any experience of removing cross linked su8 ?
I heard that su8 can be released with the released layer.
But in my case,relase layer mast be UV transmitting material.
What kind of relase layer which dosen't melt by PGMEA can be used?
Dose anyone know other way?
-- Takashi
   University of Keio,Japan