At our university (UK), we use a system whereby waste chemicals are
separated into the following categories-
- non-chlorinated solvents (this includes acetone and IPA and organic
residues from resist)
- chlorinated solvents
- aqueous soutions (acids + bases)
- HF waste is neutralised on-site
Basically, the solvents are treated as "organic waste" and the aqueous waste
is treated for metallic residue. So, any organics in the the aqueous waste
are not treated and neither are metallics in the solvents waste. However, in
the former, concentrations of organics in the aqueous qaste are quite low
and metallics are rarely found in the solvents waste.
Hope this information is helpful.
Regards,
Michael
>From: Abhinav Bhushan
>Reply-To: General MEMS discussion
>To: [email protected]
>Subject: [mems-talk] waste disposal strategy/rules/law
>Date: Thu, 21 Oct 2004 07:35:56 -0700 (PDT)
>
>Hi,
>
>I am wondering what policies are in effect at various
>mems fabs to dispose off organic/acid waste and how
>does it compare with the regulations (EPA)? For
>instance, over here, each individual is required to
>dispose off each of his/her chemical
>(acid/solvent/etc) in a separate waste bottle which is
>later picked up by the "waste disposal squad". The
>justification given to me is that it is an EPA
>regulation (so federal, which means everyone has to
>follow the same guidelines?) to separate all chemicals
>used (so no common disposal of acetone/etc). For
>instance, acetone and IPA should be in separate
>bottles. Now while it is good to have such a
>regulation, one can imagine how painful it can be
>with a bunch of people working in the lab and each
>having a couple of waste disposal bottles.
>
>Firstly, I am not aware of the EPA waste disposal
>regulations. Secondly, I am sure other mems labs are
>not following such a stringent procedure. I am curious
>to know what procedures are used at other places so
>that I may be able to better inform our
>safety/regulatory members to put in effect a more user
>friendly policy.
>
>Sincerely,
>
>Abhinav
>
>
>
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