We keep our waste segragated, with the following exceptions:
Non-chlorinated organics (Acetone, methonal, ethanol, isopropanol) are
mixed.
Chlorinated solvents (Tricholorethylene and others), with some
non-cholinated solvents is OK. (For example, if a wafer was rinsed with TCE
ans isopropyl, these would both be put in the chlorinated solvent bottle.)
David Nemeth
Senior Engineer
Sophia Wireless, Inc.
14225-C Sullyfield Circle
Chantilly, VA
Ph: (703) 961-9573 x206
Fax:(703) 961-9576
-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of Abhinav Bhushan
Sent: Thursday, October 21, 2004 10:36 AM
To: [email protected]
Subject: [mems-talk] waste disposal strategy/rules/law
Hi,
I am wondering what policies are in effect at various
mems fabs to dispose off organic/acid waste and how
does it compare with the regulations (EPA)? For
instance, over here, each individual is required to
dispose off each of his/her chemical
(acid/solvent/etc) in a separate waste bottle which is
later picked up by the "waste disposal squad". The
justification given to me is that it is an EPA
regulation (so federal, which means everyone has to
follow the same guidelines?) to separate all chemicals
used (so no common disposal of acetone/etc). For
instance, acetone and IPA should be in separate
bottles. Now while it is good to have such a
regulation, one can imagine how painful it can be
with a bunch of people working in the lab and each
having a couple of waste disposal bottles.
Firstly, I am not aware of the EPA waste disposal
regulations. Secondly, I am sure other mems labs are
not following such a stringent procedure. I am curious
to know what procedures are used at other places so
that I may be able to better inform our
safety/regulatory members to put in effect a more user
friendly policy.
Sincerely,
Abhinav
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