Our PolyMUMPs Technical FAQ
(http://www.memscap.com/memsrus/docs/polymumps.faq.v2.pdf) lists the
method to test these resonator devices:
Conditions are as follows:
50 Vdc offset (on groundplane)
+/- 8 Vac bias one side only

-Buzz

Busbee Hardy
Program Manager
+Worldwide MUMPs
+University and Government Business

MEMSCAP
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Durham, NC 27709

T-919-314-2235
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-----Original Message-----
From: Kirt Williams [mailto:[email protected]]
Sent: Tuesday, August 17, 2004 3:23 PM
To: [email protected]; General MEMS discussion
Subject: Re: [mems-talk] Comb-drive resonators in MUMPS


First see whether the structure moves by wiggling it with a probe tip.
Hopefully it does! Try driving it with an sine wave at half of the
resonant frequency. Because the electrostatic force is proportional to
the square of the voltage, the applied force is at twice the applied
frequency. Alternatively, you can add a larger DC voltage to an AC
signal at the resonant frequency, which also gives a force at the
resonant frequency. See the book "An Introduction to
Microelectromechanical Systems Engineering, 2nd Edition," pp. 201-202
for the math and more details.
    --Kirt Williams

----- Original Message -----
From: "Behraad Bahreyni" 
To: 
Sent: Tuesday, August 17, 2004 10:34 AM
Subject: [mems-talk] Comb-drive resonators in MUMPS


> Hello all,
>
>   When you send a design for fabrication for fabrication in MUMPS
> technology, a regular comb-drive resonator is often fabricated at the
> edge of your die as a test structure regardless of your design. This
> device is exactly the same as the comb-drive resonator in CaMEL
> library available from Cronos (15 40um fingers, 3um gap/width, 150um
> beams, and 2um thickness).
>
>   I wanted to know if anybody has tested such device and could
> actually drive them into observable (optically or electrically)
> resonance? The simulated resonant frequency of the device is about
> 24.7kHz, but I have been unable to make the device resonate. I am
> wondering if I am doing something fundamentally wrong in my
> experiments.
>
>   I highly appreciate any help, comments, and experiences.
>
>   Thanks,
>   Behraad
>
>
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