Nibras,

Depends on your desired thickness, it can be any spin speed from 1000 rpm
and up (I don't think any speed below would give very uniform film).
Clariant has full data sheets on the resist thickness vs. spin speed and
recommended process flow. You can call their customer service for a copy.
The easiest way to measure thickness is to do a lithography process and
use a surface profiler (such as Dektek) to scan the patterned film.


Yours sincerely,

Isaac Chan

Ph.D. Candidate
Dept. Electrical & Computer Engineering
University of Waterloo
200 University Ave. W
Waterloo, Ontario, Canada
N2L 3G1
Tel: (519) 888-4567, ext. 6014
Fax: (519) 746-6321
[email protected]
http://www.ece.uwaterloo.ca/~a-sidic



On Tue, 26 Oct 2004, Nibras Sahib Awaja wrote:

> Dear all,
> I am working with AZ4620 positive photo resist. Could anyone kindly tell me
what are the spin speed, spin time, exposure time and the exposure energy
required for AZ4620. How can I measure the thickness of the AZ4620.
> I really appreciate your help.
>
> Thanks,
> Nibras
>
>
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