Actually, spin speeds below 1000 rpm can still give a uniform coat - it just
depends on the specifications of the system you are using.
I have actually achieved up to 65 µm in a single coat using the AZP4620, with a
+/- 3% uniformity (this was primarily just to see if I could, since the optical
properties - transparency - of the resist make it difficult to expose at that
thickness - instead, for those thicknesses, I'd use AZ9260). However, I am
using a system (an EVG150) which has a few differences from the standard resist
coating track, including a highly robust spinner motor (capable of accurate spin
speeds between ~20 rpm and 10,000 rpm), and an integrated coating module cover.
Above 1000 rpm, the thickness range of AZP4620 is ~5-6 µm (at >5000rpm) to ~15
µm (at 1000 rpm).
As mentioned below, a surface profilometer (Dektak, Tencor Alpha Step) can be
used.
Also, certain models of Filmetrics interferometers can be used (in some cases,
modifications can be made to allow measurement up to 100µm).
Best Regards,
Chad Brubaker
EV Group invent * innovate * implement
Technology - Tel: 480.727.9635, Fax: 480.727.9700 e-mail:
[email protected], www.EVGroup.com
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-----Original Message-----
From: [email protected] [mailto:[email protected]] On
Behalf Of Isaac Wing Tak Chan
Sent: Tuesday, October 26, 2004 8:05 AM
To: General MEMS discussion
Subject: Re: [mems-talk] AZ4620 information
Nibras,
Depends on your desired thickness, it can be any spin speed from 1000 rpm
and up (I don't think any speed below would give very uniform film).
Clariant has full data sheets on the resist thickness vs. spin speed and
recommended process flow. You can call their customer service for a copy.
The easiest way to measure thickness is to do a lithography process and
use a surface profiler (such as Dektek) to scan the patterned film.
Yours sincerely,
Isaac Chan
Ph.D. Candidate
Dept. Electrical & Computer Engineering
University of Waterloo
200 University Ave. W
Waterloo, Ontario, Canada
N2L 3G1
Tel: (519) 888-4567, ext. 6014
Fax: (519) 746-6321
[email protected]
http://www.ece.uwaterloo.ca/~a-sidic
On Tue, 26 Oct 2004, Nibras Sahib Awaja wrote:
> Dear all,
> I am working with AZ4620 positive photo resist. Could anyone kindly tell me
what are the spin speed, spin time, exposure time and the exposure energy
required for AZ4620. How can I measure the thickness of the AZ4620.
> I really appreciate your help.
>
> Thanks,
> Nibras
>
>
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