hello,

  Spin speed 2.5Krpm Measured thickness approx
9microns

  Spin speed 4krpm measured thickness approx
5.6microns

  Double coat at 2.5krpm Measured thickness approx
20microns

 The above thickness was observed using Dektak
Profilometer.

 regards
 rakesh


--- Nibras Sahib Awaja 
wrote:

> Dear all,
> I am working with AZ4620 positive photo resist.
> Could anyone kindly tell me what are the spin speed,
> spin time, exposure time and the exposure energy
> required for AZ4620. How can I measure the thickness
> of the AZ4620.
> I really appreciate your help.
>
> Thanks,
> Nibras
>
>
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