hi ,
I am trying to write a patttern using the e-beam writer on an  SU-8 (
without developing) . As you might be knowing there is charge up since the
surface is not conductive. I sputtered some gold of 100A, and then wrote
my pattern by the e-beam writer, but after finishing that i am unable to
develop the SU-8 ( the SU-8) doesnt come off. Is it because of the
sputtering ions exposing off the whole surface and midfying the SU-8
properties...  can anyone  please suggest me a better method to make the
substrate conductive ?
regards
karthik