Dear all MEMS talkers,

I'm looking for that paper for a while. Hoping one of you can help me :-)

     L. Elbrecht, U. Storm, R. Catanescu, J. Zacheja and J. Binder,
     COMPARISON OF STRESS MEASUREMENT TECHNIQUES IN SURFACE MICROMACHINING,
     Proc. 7th Micromechanics Europe Workshop (MME 96), Barcelona 1996,
     81-84.
   or    Journal of Micromechanics and Microengineering, Volume 7, Issue 3,
     pp. 151-154 (1997).




Thx in adv.

Anh Tuan



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