Hello all,
I need to use SU-8 as a masking layer in R.T. KOH etching of silicon for
3-4 hours. Is this possible or would I have the same adhesion problems
associated with 70-90 C KOH etching ?
I also need to know how many hours SU-8 can resist 10 wt% HF. Is this also
a adhesion issue or will HF really attack SU-8 and if so, with what etch
rate?
Finally, Does anyone have a number on SU-8 electrical resistivity?
Thanks in advance
--
Srinivas Parimi
Research Assistant
Center for Microelectronics Sensors & MEMS (CMSM)
372 ERC
University of Cincinnati
Cincinnati OH 45221
(513) 556 4795
Fax: (513) 556 7326
[email protected]
http://www.mems.uc.edu
