Hi Daniel,

you can do a si-direct bond. the requirements for the wafers are a very good
TTV and a chemical clean process before cleaning.

If you have further interest in direct bonding or other kinds of bonds, you
can write me a email.

Best Regards,

Volkan

-----Ursprüngliche Nachricht-----
Von: Danielq k [mailto:[email protected]]
Gesendet: Mittwoch, 27. Oktober 2004 21:27
An: [email protected]
Betreff: [mems-talk] wafer bonding


Hi all
 Any one know how to bond two si wafers? what requirement in term of
heat, vacuum, chemical clean..
Thanks
Daniel