A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: wafer bonding
wafer bonding
2004-10-27
Danielq k
2004-10-29
Reiner Witte
2004-10-28
Bill Moffat
2004-10-28
LEIGHTON, GLENN
2004-10-28
Brubaker Chad
2004-10-29
Cetin, Volkan
wafer bonding
Reiner Witte
2004-10-29
Hi Daniel,

Have a look at:

Semiconductor Wafer Bonding, Q.-Y. Tong & U. Goesele, ISBN 0-471-57481-3

This should answer all your questions.

Reiner

<[ -----Original Message-----
<[ From: Danielq k [mailto:[email protected]]
<[ Sent: Wednesday, October 27, 2004 3:27 PM
<[ To: [email protected]
<[ Subject: [mems-talk] wafer bonding
<[
<[
<[ Hi all
<[  Any one know how to bond two si wafers? what requirement in term of
<[ heat, vacuum, chemical clean..
<[ Thanks
<[ Daniel
<[
<[


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Addison Engineering
MEMS Technology Review
Nano-Master, Inc.
Mentor Graphics Corporation