folks,

  How can i test whether a liquid trapped inside a
surface micomachined chamber has leaked through one of
the etch holes or has evaporated.

 Thanks a lot.

Sincerely
Rakesh Katragadda


--- Srinivas Parimi  wrote:

> Hello all,
>
> I need to use SU-8 as a masking layer in R.T. KOH
> etching of silicon for
> 3-4 hours. Is this possible or would I have the same
> adhesion problems
> associated with 70-90 C KOH etching ?
>
> I also need to know how many hours SU-8 can resist
> 10 wt% HF. Is this also
> a adhesion issue or will HF really attack SU-8 and
> if so, with what etch
> rate?
>
> Finally, Does anyone have a number on SU-8
> electrical resistivity?
>
> Thanks in advance
>
> --
> Srinivas Parimi
> Research Assistant
> Center for Microelectronics Sensors & MEMS  (CMSM)
> 372 ERC
> University of Cincinnati
> Cincinnati OH 45221
> (513) 556 4795
> Fax: (513) 556 7326
> [email protected]
> http://www.mems.uc.edu
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