Nickel (with Cr or Ti adhesion layer) or NiCr should be good.
-Bill

-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of Zhiyan Liu
Sent: Friday, October 29, 2004 5:06 PM
To: [email protected]
Subject: [mems-talk] Dry etch mask


Dear all,

Does anybody has an idea of the dry etch metal mask. The dry etched i used
are Cl2/BCl3.

Thank you ,

Zhiyan

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