Dear MEMS talkers,

I'm new in e-beam lithography(EBL) and looking for the way to make patterns
on quartz wafer.

The process what I want to do is
1.   PMMA coating on bare quartz
2.   EBL
3.   metal lift-off

The problem is the EBL. I have to focus on the quratz wafer and draw
sub-micron pattern.
Due to the charge-up, I cannot do anything.
Please advice me

Lee, Duhyun